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Comprehensive Microsystems [3 Volume Set]

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Description

 							
  
  Comprehensive Microsystems, is a new 3-volume reference work on Microelectromechanical Systems (MEMS). The
microsystems field has expanded to embrace a host of technologies, and microelectronics has now been joined by
micro-mechanics, micro-fluidics and micro-optics to allow the fabrication of complex, multi- functional integrated
microsystems. At over 2000 pages, Comprehensive Microsystems represents the authoritative primary reference source on
microsystems. It addresses the need for an overview of the technologies and capabilities available in this highly
interdisciplinary and dynamically-growing engineering field. 
  Comprehensive Microsystems, provides an exhaustive
overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication
and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and
industrial applications. Every article in the work has been commissioned by a panel of internationally recognized
editors and written by an acknowledged expert in any one of a variety of disciplines. The articles provide a concise
overview of a particular aspect of the microsystems field and are accompanied by extensive bibliographies,
cross-referencing and indexes, enhancing the value of the text. by guiding the user to the most relevant further reading
within the ever-expanding available literature. Much care has been given to avoid overlap and to provide consistency in
style and contents. 
  
  * The first and foremost comprehensive reference on Microelectromechanical Systems
(MEMS)
  * Unifies established research from recognized sources in an easily accessible format
  * Provides an
essential reference source for both academics and professionals in the field 						

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